plasma etching machine sentech Search Results


inductively coupled plasma etching system sentech/si 500  (SENTECH CO LTD)
90
SENTECH CO LTD inductively coupled plasma etching system sentech/si 500
Inductively Coupled Plasma Etching System Sentech/Si 500, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/result/inductively coupled plasma etching system sentech/si 500/product/SENTECH CO LTD
Average 90 stars, based on 1 article reviews
inductively coupled plasma etching system sentech/si 500 - by Bioz Stars, 2026-05
90/100 stars
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etchlab 200 reactive ion etching machine  (SENTECH CO LTD)
90
SENTECH CO LTD etchlab 200 reactive ion etching machine
Etchlab 200 Reactive Ion Etching Machine, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/result/etchlab 200 reactive ion etching machine/product/SENTECH CO LTD
Average 90 stars, based on 1 article reviews
etchlab 200 reactive ion etching machine - by Bioz Stars, 2026-05
90/100 stars
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o 2 plasma reactive ion etching (rie) processes  (SENTECH CO LTD)
90
SENTECH CO LTD o 2 plasma reactive ion etching (rie) processes
O 2 Plasma Reactive Ion Etching (Rie) Processes, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/result/o 2 plasma reactive ion etching (rie) processes/product/SENTECH CO LTD
Average 90 stars, based on 1 article reviews
o 2 plasma reactive ion etching (rie) processes - by Bioz Stars, 2026-05
90/100 stars
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100 s ar/cl2 plasma etch  (SENTECH CO LTD)
90
SENTECH CO LTD 100 s ar/cl2 plasma etch
100 S Ar/Cl2 Plasma Etch, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/result/100 s ar/cl2 plasma etch/product/SENTECH CO LTD
Average 90 stars, based on 1 article reviews
100 s ar/cl2 plasma etch - by Bioz Stars, 2026-05
90/100 stars
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ar etching system  (SENTECH CO LTD)
90
SENTECH CO LTD ar etching system
Ar Etching System, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/result/ar etching system/product/SENTECH CO LTD
Average 90 stars, based on 1 article reviews
ar etching system - by Bioz Stars, 2026-05
90/100 stars
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si 591 compact plasma etcher  (SENTECH CO LTD)
90
SENTECH CO LTD si 591 compact plasma etcher
Si 591 Compact Plasma Etcher, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/result/si 591 compact plasma etcher/product/SENTECH CO LTD
Average 90 stars, based on 1 article reviews
si 591 compact plasma etcher - by Bioz Stars, 2026-05
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ar plasma rie sentech-si591  (SENTECH CO LTD)
90
SENTECH CO LTD ar plasma rie sentech-si591
Ar Plasma Rie Sentech Si591, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/result/ar plasma rie sentech-si591/product/SENTECH CO LTD
Average 90 stars, based on 1 article reviews
ar plasma rie sentech-si591 - by Bioz Stars, 2026-05
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plasma etching system, 591  (SENTECH CO LTD)
90
SENTECH CO LTD plasma etching system, 591
Plasma Etching System, 591, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/result/plasma etching system, 591/product/SENTECH CO LTD
Average 90 stars, based on 1 article reviews
plasma etching system, 591 - by Bioz Stars, 2026-05
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reactive ion etching (rie) stage sentech si 500 icp-rie plasma etcher  (SENTECH CO LTD)
90
SENTECH CO LTD reactive ion etching (rie) stage sentech si 500 icp-rie plasma etcher
The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
Reactive Ion Etching (Rie) Stage Sentech Si 500 Icp Rie Plasma Etcher, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/result/reactive ion etching (rie) stage sentech si 500 icp-rie plasma etcher/product/SENTECH CO LTD
Average 90 stars, based on 1 article reviews
reactive ion etching (rie) stage sentech si 500 icp-rie plasma etcher - by Bioz Stars, 2026-05
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icp rie  (SENTECH CO LTD)
90
SENTECH CO LTD icp rie
The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
Icp Rie, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/result/icp rie/product/SENTECH CO LTD
Average 90 stars, based on 1 article reviews
icp rie - by Bioz Stars, 2026-05
90/100 stars
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multispectral camera sensor unit  (SENTECH CO LTD)
90
SENTECH CO LTD multispectral camera sensor unit
The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
Multispectral Camera Sensor Unit, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/result/multispectral camera sensor unit/product/SENTECH CO LTD
Average 90 stars, based on 1 article reviews
multispectral camera sensor unit - by Bioz Stars, 2026-05
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sentec monitor  (SenTec Inc)
90
SenTec Inc sentec monitor
The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
Sentec Monitor, supplied by SenTec Inc, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/result/sentec monitor/product/SenTec Inc
Average 90 stars, based on 1 article reviews
sentec monitor - by Bioz Stars, 2026-05
90/100 stars
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Image Search Results


The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b ) Reactive Ion Etching (RIE) stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.

Journal: Scientific Reports

Article Title: 3D coaxial out-of-plane metallic antennas for filtering and multi-spectral imaging in the infrared range

doi: 10.1038/srep28738

Figure Lengend Snippet: The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b ) Reactive Ion Etching (RIE) stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.

Article Snippet: The removal is performed with Reactive Ion Etching (RIE) stage (Sentech SI 500 ICP-RIE plasma etcher ), applying highly powerful Argon plasma.

Techniques: Membrane, Evaporation